Waferpedia

Comparison ledger

DFG 840 Automatic versus DFL 7560 L

Disco DFG 840 Automatic and Disco DFL 7560 L, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeRobot Wafer handling
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DFGDisco DFL
Cited variants
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
Specifications
Phase3 Phase[2]
Configuration50/60 Hz[2]Operation by touch panel LCD monitor[1]
Wafer sizeRobot Wafer handling[1]
WaferCan be modified at later date to 3”, 4” & 6” wafers and frame[1]
Uninterruptible Power Supply1[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing