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DFG 840 AutomaticversusDicing

Disco DFG 840 Automatic, Disco Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
DicingDisco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFGDisco Dicing
Cited variants—
Specifications
Phase3 Phase[2]—
Configuration50/60 Hz[3]Parts Tool[4]
ManufacturerDisco[2]—
ModelDFG 840 Automatic[2]-[4]
Equipment typeAutomatic grinder[2]Dicing saw[4]
CategoryDicing & Grinding[2]—
Wafer size8 inch[2]—
Frequency50/60 Hz[2]—
ElectricalAC 200 V[2]—
Vintage1995[2]—
Oil mist filtration systemPure Boyd PBH 100 Oil Mist Filtration System[3]—
Substrate size—up to 8 inches[5]
Substrate thickness—up to 1.25 mm[5]
Spindle—2” front-mount, air driven DC brushless, closed-loop control[5]
Y-axis—closed-loop linear encoder[5]
Height sensing—non-contact optical[5]
Pattern recognition—auto-focusing and programmable illumination[5]
Maximum substrate thickness—up to 1.25 mm[5]
Applications—dicing of silicon, bonded Si wafers, and all types of glasses[5]
Tool type—Dicing saw[5]
Cutting range—160 mm x 162 mm[1]
Max substrate size—6” wafers or 6″ x 6″ substrates[1]
Cutting blade thickness—100 – 400 micron[1]
Positioning accuracy—< 0.005/160[1]
Spindle power/speed—1.5 kW spindle at 30,000 per minute[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]ece.utoronto.caece.utoronto.ca
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]cnfusers.cornell.educnfusers.cornell.edu