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Disco

Dicing

Dicing & GrindingDisco Dicing family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Disco dicing saw is a semiconductor dicing tool capable of handling up to 8 inch substrates. The Disco dicing saw uses a 2” front-mount spindle with closed-loop control and a pattern recognition system for auto-focusing.[1]

DiscoDicing
No photo available yet

Power

1.5 kW spindle at 30,000 per minute[3]

Performance

< 0.005/160[3]

Optics

non-contact optical[1]

What it is

General reference — not yet source-verified

A dicing saw is semiconductor assembly equipment used to cut individual die apart from a processed wafer or other microelectronic substrate. Dicing equipment typically cuts along the unused lanes between devices, often called streets.

How it works

The DISCO dicing saw at Cornell is capable of handling substrates up to 8 inch and thickness up to 1.25 mm. The DISCO dicing saw at Cornell has a front-mount spindle, an air-driven DC brushless motor with closed-loop control, a closed-loop Y-axis linear encoder, non-contact optical height sensing, and a pattern recognition system with auto-focusing and programmable illumination. The DISCO dicing saw at Cornell is optimized for simple and tight-tolerance products up to 8 inch by 8 inch.[1]

Where it fits in the process flow

Semiconductor dicing equipment is used to cut apart individual die on a wafer. Dicing equipment is an essential step in the semiconductor manufacturing process.[4]

Applications

The DISCO dicing saw at Cornell has been used for dicing silicon, bonded Si wafers, and all types of glasses. The Cornell tool does not allow GaAs substrates.[1]

What do the numbers mean?

Power & electrical1

Spindle power/speed
1.5 kW spindle at 30,000 per minute[3]
Accurate?

Wafer handling6

Substrate size
up to 8 inches[1]
Accurate?
Substrate thickness
up to 1.25 mm[1]
Accurate?
Substrate size
up to 8 inch substrates[1]
Accurate?
Maximum substrate thickness
up to 1.25 mm[1]
Accurate?
Applications
dicing of silicon, bonded Si wafers, and all types of glasses[1]
Accurate?
Max substrate size
6” wafers or 6″ x 6″ substrates[3]
Accurate?

Optics & imaging2

Height sensing
non-contact optical[1]
Accurate?
Pattern recognition
auto-focusing and programmable illumination[1]
Accurate?

Performance1

Positioning accuracy
< 0.005/160[3]
Accurate?

Control & software1

Spindle
2” front-mount, air driven DC brushless, closed-loop control[1]
Accurate?

Configuration & options7

Parts Tool[2]
Accurate?
Y-axis
closed-loop linear encoder[1]
Accurate?
Equipment type
Dicing saw[2]
Accurate?
Model
-[2]
Accurate?
Tool type
Dicing saw[1]
Accurate?
Cutting range
160 mm x 162 mm[3]
Accurate?
Cutting blade thickness
100 – 400 micron[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
DAD3220——Automatic dicing saw with auto-alignment, auto-focus, auto-kerf check, 4 cutting channels with 320 degree max rotating angle, cutting blades thickness 100-400 micron, max substrate size 6” wafers or 6”x6” substrates, 160mm x 162mm cutting range, <0.005/160 positioning accuracy, 1.5 kW spindle at 30,000 per minute.ece.utoronto.ca[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Spindle power/speed1.5 kW spindle at 30,000 per minute[3]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does semiconductor dicing equipment do?

Semiconductor dicing equipment is used to cut apart individual die on a wafer. A dicing saw typically cuts along the unused section between dice called the street.[4]

What substrate size and thickness can the DISCO dicing saw at Cornell handle?

The DISCO dicing saw at Cornell is capable of handling substrates up to 8 inch with a thickness of up to 1.25 mm.[1]

How is dicing tape used in wafer dicing?

Dicing tape is a backing tape used during wafer dicing or other microelectronic substrate separation. The tape holds the pieces of the substrate together during the cutting process by mounting them to a thin metal frame, and the dies are removed from the tape later in the process.[5]

Not publicly documented

The following facts about the Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Dicing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Dicing are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (19)Every fact above is drawn from these public sources
  1. [1]cnfusers.cornell.edu — cnfusers.cornell.educnfusers.cornell.edu
  2. [2]inventory listing
  3. [3]ece.utoronto.ca — ece.utoronto.caece.utoronto.ca
  4. [4]Semiconductor Dicing Equipment — chiphistory.orgchiphistory.org
  5. [5]Dicing tape - Wikipedia — en.wikipedia.orgen.wikipedia.org
  6. [6]Dicing - Wikipedia — en.wikipedia.orgen.wikipedia.org
  7. [7]Packaging Lab | Quantum-Nano Fabrication and Characterization Facility | University of Waterloo — uwaterloo.cauwaterloo.ca
  8. [8]Packaging &#8211; Miscellaneous &#8210; Center of MicroNanoTechnology CMi &#8208; EPFL — epfl.chepfl.ch
  9. [9]Equipment Page | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
  10. [10]Nanoscribe Photonics GT2 high-resolution 3D printer - AggieFab Nanofabrication Facility — aggiefab.tamu.eduaggiefab.tamu.edu
  11. [11]MNTC - Equipment and Facilities | Service Centers — louisville.edulouisville.edu
  12. [12]Disco Automatic Dicing Saw | Nanotechnology Core Facility | University of Illinois Chicago — ncf.uic.eduncf.uic.edu
  13. [13]Disco 321 Wafer Dicing Saw — tmi.utexas.edutmi.utexas.edu
  14. [14]Disco DFL7340 Stealth Dicer - Equipment - nanoFAB Confluence — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  15. [15]Bonding & Packaging — nanolab.berkeley.edunanolab.berkeley.edu
  16. [16]Dicing Saw | Shared Materials Instrumentation Facility — smif.pratt.duke.edusmif.pratt.duke.edu
  17. [17]CNS Consolidated Rates — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
  18. [18]Packaging & Assemby — tudelft.nltudelft.nl
  19. [19]DBG・封装元件基板的分割 - DISCO Corporation — disco.co.jp (Feb 22, 2020)web.archive.org
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Last updated Oct 20, 2026.

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