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DFL 7160 AutomaticversusDicing

Disco DFL 7160 Automatic, Disco Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
DicingDisco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFL 7160Disco Dicing
Cited variants
  • DFL 7160 Laser Dicing[1]
Specifications
Configuration1 Cassette port[3]Parts Tool[5]
Wafer Size12 inch[3]—
Cassette Ports1[3]—
DicingYes[4]—
Circular Ring Cutting of Taiko WafersYes[4]—
AutomationAutomatic[1]—
Substrate size—up to 8 inches[6]
Substrate thickness—up to 1.25 mm[6]
Spindle—2” front-mount, air driven DC brushless, closed-loop control[6]
Y-axis—closed-loop linear encoder[6]
Height sensing—non-contact optical[6]
Pattern recognition—auto-focusing and programmable illumination[6]
Equipment type—Dicing saw[5]
Model—-[5]
Maximum substrate thickness—up to 1.25 mm[6]
Applications—dicing of silicon, bonded Si wafers, and all types of glasses[6]
Tool type—Dicing saw[6]
Cutting range—160 mm x 162 mm[2]
Max substrate size—6” wafers or 6″ x 6″ substrates[2]
Cutting blade thickness—100 – 400 micron[2]
Positioning accuracy—< 0.005/160[2]
Spindle power/speed—1.5 kW spindle at 30,000 per minute[2]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]ece.utoronto.caece.utoronto.ca
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]inventory listing
  6. [6]cnfusers.cornell.educnfusers.cornell.edu