Waferpedia

Comparison ledger

DFL 7161versus1300 Series Safety

Disco DFL 7161, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
OEMDiscoThermo Fisher
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2026 Third-party support only
Control system——
Generation——
FamilyDisco DFL 7161Thermo Fisher 1300
Specifications
Processing methodAblation[1]—
Max workpiece sizeΦ300 mm[1]—
X-axis Processing range310 mm[1]—
X-axis Moving speed1 - 1000 mm/s[1]—
Y-axis Processing range310 mm[1]—
Y-axis Index step0.0001 mm[1]—
Y-axis Positioning accuracy0.003/310 (Single error) 0.002/5[1]—
Z-axis Moving resolution0.000015 mm[1]—
Z-axis Repeatability accuracy0.002 mm[1]—
θ-axis Max. rotating angle330 deg (standard) 380 deg (option)[1]—
Equipment dimensions (W×D×H)1560 × 1550 × 1800 mm[1]—
Equipment weightApprox. 2300 kg[1]—
Configuration—Class II[2]
Cabinet type—Class II, Type A2 biological safety cabinet[3]
Airflow compensation—SmartFlow airflow compensation system[3]
Motors—Dual DC motors[3]
Front window design—SmartClean front window design[3]
Control panel—Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3]
UV light—Programmable UV light[3]
SmartPort—SmartPort convenience for routing tubing and cables through the side walls[3]
Available widths—3-foot, 4-foot, 5-foot, and 6-foot sizes[3]
Front opening choices—8-inch or 10-inch front opening[3]
Filter specification—H14 HEPA filters, EN 1822, 99.995% @ MPPS[4]
Certification—NSF/ANSI 49, UL, CE[4]
Service valves—Up to 6 total, 3 on each side wall[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]disco.co.jpdisco.co.jp
  2. [2]inventory listing
  3. [3]thermofisher.comthermofisher.com
  4. [4]documents.thermofisher.comdocuments.thermofisher.com