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DFL 7340 Stealth Laser Dicingversus15

Disco DFL 7340 Stealth Laser Dicing, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
15Lapmaster
OEMDiscoLapmaster
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFL 7340Lapmaster 15
Specifications
ConfigurationPower supply removed[1]—
OEMDisco[2]—
ModelDFL7340[2]—
Process areaPackaging[2]—
PurposeLaser Stealth dicing of Si wafers[3]—
Applications fieldContact-less dicing of Silicon wafers PICs, MEMS, BIO-MEMS and Semiconductor non-wet dicing[3]—
Wavelength1342 nm[2]—
Maximum sample diameter200 mm[2]—
Wafer size200 mm or smaller[3]—
Compatible materialsSi wafers only[2]—
Dicing orientationTopside or backside (through tape) dicing possible[2]—
Position accuracy3 µm[3]—
Feeding speed1.0–1000 mm/s[3]—
Input Power—110 Vac[4]
Plate Diameter—15 inches (381 mm)[5]
Number of Conditioning Rings—3[5]
Ring ID—5.5 inches (140 mm)[5]
Standard RPM—60[5]
RPM Range (Variable Speed Drive)—0-60[5]
Drive Motor - Lapper—0.5 HP (0.37 kW)[5]
Drive Motor - Polisher—0.75 HP (0.56 kW)[5]
Length—25 inches (635 mm)[5]
Width—20 inches (508 mm)[5]
Height—24 inches (610 mm)[5]
Estimated Shipping Weight—285 lbs (129.3 kg)[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  3. [3]c2mi.cac2mi.ca
  4. [4]inventory listing
  5. [5]web.archive.orgweb.archive.org