Waferpedia

Comparison ledger

DFL 7560 L versus KR15

Disco DFL 7560 L and Disco KR15, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
KR15Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeRobot Wafer handling8"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DFLDisco KR15
Cited variants
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
  • KR15-A/KR15-B[2]
Specifications
Wafer sizeRobot Wafer handling[1]
WaferCan be modified at later date to 3”, 4” & 6” wafers and frame[1]
ConfigurationOperation by touch panel LCD monitor[1]
Uninterruptible Power Supply1[1]
Blade designationDisco KR15[3]
Blade thickness200 micron[3]
Blade gritlow grit[3]
Intended materialssapphire, glass, and silicon[3]
Max. workpiece sizeΦ8"[3]
Thickness200 micron[3]
GritLow grit[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]thk.comthk.com
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu