Comparison ledger
Edwards IH 600 Vacuum, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IH 600 VacuumEdwards | |
|---|---|---|
| OEM | Edwards | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards IH 600 Vacuum | Tri -Mist 850 Electronic Air Filter |
| Cited variants |
| — |
| Specifications | ||
| Type | Vacuum pump[2] | — |
| System family | iH dry pumping systems[1] | — |
| Pump configuration | HCDP80 dry pump with HCMB600 mechanical booster pump[1] | — |
| Peak speed | 600 cfm[3] | — |
| Ultimate vacuum | 3.2 x 10^-4 mbar; 2 x 10^-4 torr; 1.5 x 10^5 Pa; 5.3 x 10^4 Pa[3] | — |
| Inlet connection | ISO100[3] | — |
| Outlet connection | NW40[3] | — |
| Typical shaft seal nitrogen flow | 4 slm[3] | — |
| Weight | 415 kg / 913 lb[3] | — |
| Power input | 3.1 kW at 50 Hz; 3.4 kW at 60 Hz[3] | — |
| Rated motor power | 5.1 kW at 50 Hz; 6.1 kW at 60 Hz[3] | — |
| Oil capacity | 1.65 liter[3] | — |
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