Waferpedia

Comparison ledger

EG 4090 Automatic WaferversusP 12 XL

Electroglas EG 4090 Automatic Wafer, Tokyo Electron P 12 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Test & Probe, null[1]
Side-by-side comparison of selected equipment models
Attribute
P 12 XLTokyo Electron
OEMElectroglasTokyo Electron
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2026 Still in service—
Control system——
Generation——
FamilyElectroglas EG 4090Tokyo Electron P 12
Cited variants
  • EG 4090 Automatic Wafer Prober - Nickel Chuck - Hot Chuck Temp - Airblower: IH - Thinwafer - Armsize: IH Bernoulli[2]
  • EG 4090 Automatic Wafer Prober - Nickel Chuck - Hot Chuck Temp - Airblower: IH - Armsize: IH Big[3]
  • EG 4090 Automatic Wafer Prober - Nickel Chuck - Hot Chuck Temp - Armsize: Small[4]
—
Specifications
ConfigurationNickel Chuck[2]Tri-Temp[9]
AirblowerIH[2]—
ArmsizeIH Bernoulli[2]—
Wafer Size Support150 mm and 200 mm wafers[6]—
Chuck TypeNickel or Gold, hot chuck[2]—
Alignment AccuracyMicron-level[6]—
Input Voltage115VAC[7]—
Vision ModulePRM-3[7]—
Display Control ModuleDCM II or DCM-2[7]—
Material Handler ModuleStation CONT (ESC) or MHCM[7]—
Prober Control ModuleYes[7]—
Cassette LoaderYes[7]—
Probing ModesManual, semi-automatic, and fully automatic[6]—
Temperature ControlHot chuck with temperature control (TC2000)[8]—
Thinwafer SupportYes (listed as option)[2]—
Process—PPF[9]
Phase—1 Phase[10]
Voltage—208 V[10]
Wafer Size—12 inch[12]
Tri-Temp—Tri-Temp 2002 (10), 2003 (3), 2004, 2005 Vintage[9]
OEM—Tokyo Electron[9]
Model—P 12 XL[9]
Equipment type—Prober[9]
Wafer sizes—12 inch[9]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (13)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]inventory listing
  6. [6]junr.com.cnjunr.com.cn
  7. [7]jmcserv.comjmcserv.com
  8. [8]jmcserv.comjmcserv.com
  9. [9]inventory listing
  10. [10]inventory listing
  11. [11]inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing