Waferpedia

Tokyo Electron

P 12 XL

Test & ProbeTokyo Electron P 12 family
Research Quality: 50% complete
P 12 XL — Inventory photo
Fig. 01P 12 XLInventory photo[1]

What it is

General reference — not yet source-verified

It is used in semiconductor test flows to position wafers for electrical probing and related evaluation before later assembly or further sort steps.

How it works

General reference — not yet source-verified

A wafer prober mechanically aligns a wafer, brings probe hardware into contact with selected sites, and enables electrical measurements on dies or structures across the wafer. The platform combines precision motion, alignment, and contact control so test equipment can address specific locations repeatably.

Where it fits in the process flow

General reference — not yet source-verified

In the semiconductor flow, a wafer prober sits in the test and characterization stage, between wafer fabrication and downstream assembly or final package test. It is used while the wafer is still intact so individual devices or test structures can be evaluated at the wafer level.

Applications

General reference — not yet source-verified

This class of equipment is used for wafer-level electrical test, parametric characterization, and device screening on semiconductor wafers. It is also used for probing test structures during process development and manufacturing control.

What do the numbers mean?

Power & electrical2

50/60 Hz[2]
Accurate?
Voltage
208 V[2]
Accurate?

Wafer handling1

Missing Loader Control Box (1)[3]
Accurate?

Configuration & options6

Process
PPF[1]
Accurate?
Tri-Temp[1]
Accurate?
Phase
1 Phase[2]
Accurate?
Working (2)[3]
Accurate?
Not Working (2)[3]
Accurate?
Bootup does not complete (1)[3]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[2]
  • Voltage208 V[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the P 12 XL?

It is a wafer prober in the test and probe category.[4][1][5][6][7]

Not publicly documented

The following facts about the P 12 XL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 12 XL are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P 12 XL are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 12 XL are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 12 XL are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 12 XL is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (9)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]Equipment inventory listing
  8. [8]Equipment inventory listing
  9. [9]Prober Management Software | Tokyo Electrontel.com (Dec 10, 2007)web.archive.org
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →