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EG5versus03 RR 8120-001-001 Wafer Exchanger

Electroglas EG5, Rorze 03 RR 8120-001-001 Wafer Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
EG5Electroglas
OEMElectroglasRorze
CategoryTest & ProbeTest & Probe
Wafer size150mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas EG5Rorze 03 RR 8120-001-001 Wafer Exchanger
Cited variants—
Specifications
Product lineEG5|300[1]—
VariantARGOS[1]—
DescriptionElectroglas' highest accuracy 300mm wafer prober[1]—
Probe-to-pad accuracy±2.5 micron[1]—
Stepping accuracy1.0 micron[1]—
Wafer sizes handled150mm, 200mm, and 300mm wafers[1]—
Variant descriptionFine-pitch probing for in-line parametric test structures[1]—
Tool typewafer prober[1]—
Accuracy positioningprobe-to-pad accuracy of ±2.5 micron[1]—
Handled wafer sizes150mm, 200mm, 300mm[1]—
Model relationEG5|300e is a fine-pitch probing model for in-line parametric test structures[1]—
Wafer size—8 inch[2]
Manufacturer—Rorze[2]
Model—03 RR 8120-001-001[2]
Equipment type—Wafer Exchanger[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com