Electroglas

EG5

Test & Probe 150mm Electroglas EG5 family

Research Quality: 40% complete

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EG5 — web.archive.org — Fig. 01EG5web.archive.org^[1]

Wafer size

150mm

Performance

±2.5 micron^[3]

What is it?

The sources identify the Electroglas EG5|300 ARGOS as a wafer prober and describe it as Electroglas' highest accuracy 300mm wafer prober. It is stated to handle 150mm, 200mm, and 300mm wafers, and the sources also identify an EG5|300e variant for fine-pitch probing on in-line parametric test structures.

What can it run?

Process applications and technology nodes documented for this tool.

extremely tight-pitch probing on leading edge devices
fine-pitch probing for in-line parametric test structures

What do the numbers mean?

Wafer handling2

Description: Electroglas' highest accuracy 300mm wafer prober^[3]
Wafer sizes handled: 150mm, 200mm, and 300mm wafers^[3]

Performance2

Probe-to-pad accuracy: ±2.5 micron^[3]
Stepping accuracy: 1.0 micron^[3]

Configuration & options4

Product line: EG5|300^[3]
Variant: ARGOS^[3]
Variant: EG5|300e^[3]
Variant description: Fine-pitch probing for in-line parametric test structures^[3]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
EG5\|300 ARGOS	—	—	Described as Electroglas' highest accuracy 300mm wafer prober; includes precise stepping accuracy, integrated alignment system, air bearing closed-loop linear motion system, and capability for 150mm, 200mm, and 300mm wafers.	web.archive.org^[3]
EG5\|300e	—	—	Fine-pitch probing for in-line parametric test structures.	web.archive.org^[3]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the EG5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EG5 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the EG5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EG5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EG5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EG5 are on record.
Answerable by: an OEM parts catalog or a service engineer