Comparison ledger
Electroglas EG5, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EG5Electroglas | |
|---|---|---|
| OEM | Electroglas | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | 150mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Electroglas EG5 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Cited variants | — | |
| Specifications | ||
| Product line | EG5|300[1] | — |
| Variant | ARGOS[1] | — |
| Description | Electroglas' highest accuracy 300mm wafer prober[1] | — |
| Probe-to-pad accuracy | ±2.5 micron[1] | — |
| Stepping accuracy | 1.0 micron[1] | — |
| Wafer sizes handled | 150mm, 200mm, and 300mm wafers[1] | — |
| Variant description | Fine-pitch probing for in-line parametric test structures[1] | — |
| Tool type | wafer prober[1] | — |
| Accuracy positioning | probe-to-pad accuracy of ±2.5 micron[1] | — |
| Handled wafer sizes | 150mm, 200mm, 300mm[1] | — |
| Model relation | EG5|300e is a fine-pitch probing model for in-line parametric test structures[1] | — |
| Chamber Size | — | 1.2 cubic feet[2] |
| Temperature Range | — | -68°C to +180°C[2] |
| Control | — | +/-1.0°C[2] |
| Manufacturer | — | Tenney[2] |
| Model | — | JR-A-F4T[2] |
| Short description | — | Junior compact temperature test chambers[2] |
| Control accuracy | — | +/-1.0°C[2] |
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