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Comparison ledger

Datacon 8800 CHAMEO advancedversus505 Die Attach

Esec Datacon 8800 CHAMEO advanced, MRSI 505 Die Attach, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMEsecMRSI
CategoryPackaging & BondingPackaging & Bonding
Wafer size4"4"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEsec Datacon 8800 CHAMEO advancedMRSI 505 Die Attach
Specifications
Product familyHybrid Bonding[1]—
Wafer size4" to 12" (on 8" or 12" wafer frames)[1]—
Bonding methodFlip Chip Bonder[2]—
X/Y placement accuracy local± 3 µm at 3 sigma[3]—
X/Y placement accuracy global± 5 µm at 3 sigma[3]—
Bond force2 - 50 N[3]—
Die size face down0.3 - 30 mm[3]—
Die size face up2.5 - 25 mm[3]—
Die thickness50 µm - 3 mm[3]—
Strip, boats, panelsUp to 340 mm[3]—
Substrate wafer12"[3]—
FluxerOption, various cavity plates available[3]—
Multi ChipIncluded[3]—
UPHUp to 7,000[3]—
Vision system6 x 6 mm FoV for substrate and upwards camera; 12 x 12 mm FoV for wafer camera[3]—
Field of view12 x 12 mm[2]—
Overall dimensions1600 x 1200 x 1880 mm[2]—
Wafer flip chip placement speed6000 UPH[2]—
Wafer flip chip without dipping placement speedUp to 9000 UPH[2]—
ApplicationChip attach for WL-FOP processes[3]—
Supported package designsFace-down (flip mode) and face-up (non flip mode)[3]—
FO-WLP carrier300 mm / 340 mm[3]—
ThroughputUp to 7,000 UPH[3]—
Clean room classISO 5 (option)[3]—
Footprint1,600 mm x 1,200 mm x 1,880 mm (W x D x H)[3]—
Wafer Size—4", Also used on Substrate 3x5" and Chip on Tape[4]
Configuration—Comes with Standard Boats / Cassettes[4]
Also used on Substrate—3x5" and Chip on Tape[4]
Comes with Standard Boats / Cassettes—Yes[4]
Vintage (listed unit)—2001[5]
Description—Die Attach/ Multichip Module[5]
Version—assembly[5]
Manufacturer—MRSI[6]
Model—505[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]besi.combesi.com
  2. [2]semiconductor.directorysemiconductor.directory
  3. [3]besi.combesi.com
  4. [4]inventory listing
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]Equipment inventory listing