Comparison ledger
EV Group 301 Cleaning, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 301 CleaningEV Group | 1000FPYES |
|---|---|---|
| OEM | EV Group | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Manual wafer loading | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 301 Cleaning | YES 1000FP |
| Specifications | ||
| Configuration | with camera for bond void inspection[1] | — |
| Wafer size | Manual wafer loading[2] | — |
| Category | Wet Processing / Clean[3] | — |
| Optics | Camera for bond void inspection[1] | — |
| Application | SOI, MEMS and compound semiconductor bonding[1] | — |
| Vintage | 2011[1] | — |
| System type | — | Plasma cleaning system[4] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[4] |
| Model | — | Glen/YES 1000FP[4] |
| Designed use | — | Designed to accept a range of shelf sizes[4] |
| Application focus | — | Changing needs of the flat panel industry[4] |
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