Waferpedia

Comparison ledger

420 Mask versus 6200 Mask

EV Group 420 Mask and EV Group 6200 Mask, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
420 MaskEV Group
6200 MaskEV Group
OEMEV GroupEV Group
CategoryLithographyLithography
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyEV Group 420 MaskEV Group 6200
Specifications
ConfigurationCan only align wafers[1]3 Stations:[2]
Power1000W light source[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing