Comparison ledger
EV Group EV 620, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EV 620EV Group | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | EV Group | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | Does not have the exposure optics. It is just a manual aligner for wafer bonding | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group EV 620 | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Wafer size | Does not have the exposure optics. It is just a manual aligner for wafer bonding[1] | — |
| Manufacturer | EV Group[1] | — |
| Model | EV 620[1] | — |
| Tool type | Bond Aligner[1] | — |
| Category | Lithography[2] | — |
| Exposure optics | Does not have the exposure optics[1] | — |
| Operating mode | Manual aligner for wafer bonding[1] | — |
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