Waferpedia

Comparison ledger

Gemini Automated Production FusionversusELD300

EV Group Gemini Automated Production Fusion, SUSS MicroTec ELD300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ELD300SUSS MicroTec
OEMEV GroupSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size300mm300mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group Gemini AutomatedSUSS MicroTec ELD300
Specifications
ConfigurationInterlocked doors with signal light tower[1]—
Wafer Size12"/300mm[1]up to 300 mm[2]
Alignment ModuleSmartView NT with 5x objectives[1]—
Robot4-Axis Industrial Robot[1]—
SoftwareEVG CIM Framework Software GUI[1]—
CertificationCE Certified[1]—
Wafer LoadingFOUP loading with empty/present sensor[1]—
Operation—Semi-automated[2]
Process—Excimer Laser-Assisted Debonding[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]hilpert.chhilpert.ch