Comparison ledger
Filmetrics F10-RT-UVX and Filmetrics F50, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | F10-RT-UVXFilmetrics | F50Filmetrics |
|---|---|---|
| OEM | Filmetrics | Filmetrics |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics F10-RT-UVX | Filmetrics F50 |
| Cited variants | — | |
| Specifications | ||
| Function | Reflection/Transmission Spectra & Optical Film Thickness[2] | — |
| Model | F10-RT-UVX[2] | F50-UV[3] |
| OEM | Filmetrics[2] | — |
| Manufacturer | — | Filmetrics[3] |
| Tool Type | — | Inspection, Test and Characterization[3] |
| Description | — | Thin-Film Reflectometry[3] |
| Reflection spectrum range | — | 190-1100 nm[3] |
| Light sources | — | Deuterium (UV) and Halogen (Vis-nIR)[3] |
| Thickness / optical constants range | — | 10 Å to 150 µm thickness, n, and k measurements[3] |
| Wafer mapping size | — | Motorized mapping on wafers up to 150 mm[3] |
| Small substrate size | — | ≥ 2-3 mm[3] |
| Measurement spot size | — | Approx. 1-2 mm[3] |
| Measurement capability | — | Can model up to three layers with accuracy[3] |
| Measurement modes | — | Motorized wafer-mapping or non-motorized single-spot measurements[3] |
| Maximum sample size | — | Samples as large as 300 mm in diameter[1] |
| Stage type | — | Motorized R-Theta stage[1] |
| Mapping speed | — | As quickly as two points per second[1] |
| Computer interface | — | USB port connection to a Windows computer[1] |
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