Filmetrics

F50

Metrology & Inspection 150mm Filmetrics F50 family

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Plate 01Nanometrix - Filmetrics F50
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Plate 02F50 Hardware Installation
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Wafer size

150mm

Performance

Can model up to three layers with accuracy^[1]

Optics

190-1100 nm^[1]

Preceded by

First in line

This tool

F50

Succeeded by

F60

All related

What is it?

The Filmetrics F50 is listed as an optical film thickness and wafer-mapping tool. The source states that it uses white-light reflection with deuterium (UV) and halogen (Vis-nIR) lamps, can perform motorized wafer mapping or single-spot measurements, and is used for thickness and optical property measurements on films, including full-wafer mapping.

What can it run?

Process applications and technology nodes documented for this tool.

Thickness and optical property measurements of films on substrates
Mapping of thin films on full wafers
White-light reflection-based thin-film reflectometry

What do the numbers mean?

Wafer handling3

Wafer mapping size: Motorized mapping on wafers up to 150 mm^[1]
Small substrate size: ≥ 2-3 mm^[1]
Measurement modes: Motorized wafer-mapping or non-motorized single-spot measurements^[1]

Optics & imaging2

Reflection spectrum range: 190-1100 nm^[1]
Thickness / optical constants range: 10 Å to 150 µm thickness, n, and k measurements^[1]

Performance1

Measurement capability: Can model up to three layers with accuracy^[1]

Control & software1

Computer interface: USB port connection to a Windows computer^[2]

Configuration & options9

Manufacturer: Filmetrics^[1]
Model: F50-UV^[1]
Tool Type: Inspection, Test and Characterization^[1]
Description: Thin-Film Reflectometry^[1]
Light sources: Deuterium (UV) and Halogen (Vis-nIR)^[1]
Measurement spot size: Approx. 1-2 mm^[1]
Maximum sample size: Samples as large as 300 mm in diameter^[2]
Stage type: Motorized R-Theta stage^[2]
Mapping speed: As quickly as two points per second^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
F50-UV	—	—	Distinguished by wavelength range; described as requiring shorter wavelengths for thinner films.	web.archive.org^[2]
F50-NIR	—	—	Distinguished by wavelength range; longer wavelengths allow measurement of thicker, rougher, and more opaque films.	web.archive.org^[2]
F50-EXR	—	—	Distinguished by wavelength range.	web.archive.org^[2]
F50-UVX	—	—	Distinguished by wavelength range.	web.archive.org^[2]
F50-XT	—	—	Distinguished by wavelength range.	web.archive.org^[2]
F50	—	—	Standard F50 model listed in the archived Filmetrics product page with wavelength range 380-1050nm and thickness range 15nm–70um.	web.archive.org^[2]

LineageSucceeded by F60 All related models

Interested in this tool?

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What replaced it?

siblingFilmetrics F10-RT-UVX— Listed as another Filmetrics optical film thickness tool in the UCSB tool list.source^[3]
successorFilmetrics F60— The source says the F60-t family maps film thickness and index just like the F50 products.source^[4]
siblingFilmetrics F60-t— The F60-t family maps film thickness and index just like the F50 products.source^[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F50 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F50 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F50 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F50 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F50 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F50 are on record.
Answerable by: an OEM parts catalog or a service engineer