Comparison ledger
GigaMat 3806 L, Strasbaugh 6 DF DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 3806 LGigaMat | 6 DF DC 1Strasbaugh |
|---|---|---|
| OEM | GigaMat | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | 10" Diameter Wafer Carrier: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | GigaMat 3806 L | Strasbaugh 6 DF DC 1 |
| Specifications | ||
| Configuration | With Water Jet[1] | Refurbished[2] |
| Voltage | 480 VAC[1] | 230 V, Single Phase, 60 Hz[2] |
| Frequency | 60 Hz[1] | — |
| Full Load | — | 15 A[2] |
| Motor | — | 8.0 A[2] |
| OEM | — | Strasbaugh[2] |
| Model | — | 6 DF DC 1[2] |
| Category | — | CMP[2] |
| Type | — | Chemical Mechanical Polisher[2] |
| Capacity | — | 24-inch capacity overarm spindle polisher[2] |
| Process | — | multi process[2] |
| Variable speed | — | 0-100 RPM (DC) electronic drives[2] |
| Work spindle motor | — | 1.5 HP[2] |
| Oscillator motor | — | 1 HP[2] |
| Digital tachometer | — | included[2] |
| Digital timer | — | included[2] |
| Load meter | — | included[2] |
| Alarm system | — | included[2] |
| Slurry pan | — | stainless steel square slurry pan with sloped drain[2] |
| Slurry manifold | — | adjustable Snaploc line with flow valve[2] |
| Polishing table | — | 22-inch diameter, 1-inch thick, precision lapped flat to 0.0001"[2] |
| Wafer carrier | — | 10-inch diameter wafer carrier, stainless steel, W-bearing, nylon quill insert, precision lapped flat to 0.0001"[2] |
| Spindle riser | — | 4-inch spindle riser; 8 thread, 1"[2] |
| Spindle to tooling adapter hub | — | stainless steel, 8 thread, 1"[2] |
| Spindle to tooling adapter hub material | — | aluminum[2] |
| Drive specification | — | 2 HP, 180 VDC, 150 RPM[2] |
| High downforce polishing | — | included[2] |
| Wafer size | — | 10" Diameter Wafer Carrier:[2] |