Waferpedia

Comparison ledger

3828-46versus120 Continuous

GigaMat 3828-46, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
3828-46GigaMat
OEMGigaMatLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGigaMat 3828-46Lapmaster 120 Continuous
Specifications
MakeGigaMat[1]—
Model3828-46[1]—
Tool typeCMP (Chemical Mechanical Polisher)[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing