Waferpedia

Comparison ledger

1088versusVTP 1500 LH Vertical

Heller 1088, Semitool VTP 1500 LH Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
1088Heller
OEMHellerSemitool
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088Semitool VTP 1500 LH Vertical
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[1]—
Heating MethodForced convection[1]—
Conveyor Width18 inches (45 cm)[1]—
Heated Length43.5 inches (111 cm)[1]—
Overall Length96 inches (244 cm)[1]—
Height50 inches (127 cm)[1]—
Net Weight900 lbs (409 kg)[1]—
Thermal ProfilerIncluded[1]—
Oven TopCounter balance for easy access to conveyor[1]—
Solder CompatibilityLead-free and leaded soldering[1]—
Configuration—High temperature dry oxidation process[2]
Manufacturer—Semitool[2]
Model—VTP 1500 LH[2]
Description—Vertical Furnace[3]
Process—High temperature dry oxidation process[2]
Part No.—VTP1500LH[3]
Equipment type—Vertical Furnace[2]
Process description—High temperature dry oxidation process[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]smtdevices.comsmtdevices.com
  2. [2]inventory listing
  3. [3]semi-sps.comsemi-sps.com
  4. [4]semistarcorp.comsemistarcorp.com