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Comparison ledger

1810 MK III IRversus0332 F 9453 302 Diffusion

Heller 1810 MK III IR, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1810Varian 0332 F 9453 302 Diffusion
Specifications
Configuration18” On Load Conveyor and 18” Off Load Conveyor[1]—
Temperature20 Independent Temperature Controlled 350°C IR Heating Zones[1]—
Voltage480V, 50/60 HZ, 3 phase, 100 AMPS per phase · Left to Right Conveyor Travel[1]—
Floor space requirements183"L x 54"W x 63"H[1]—
Equipment typeIR Cure Oven[1]—
On-load conveyor width18 in[1]—
Off-load conveyor width18 in[1]—
Heated tunnel length130 in[1]—
Heating zones20 independent temperature controlled 350°C IR heating zones[1]—
Temperature controlPID temperature control[1]—
Temperature stability+/- 1°C[1]—
Power480V, 50/60 Hz, 3 phase, 100 AMPS per phase[1]—
Conveyor travelLeft to right[1]—
Asset Number—142841[2]
Last Confirm Date—October 14, 2025[3]
Make—Varian[2]
Model—0332 F 9453 302[2]
Category—Thermal / Diffusion[4]
Tool type—diffusion pump[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]fab-spares.comfab-spares.com
  4. [4]waferpedia.comwaferpedia.com