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2043MK5-VRversus0332 F 9453 302 Diffusion

Heller 2043MK5-VR, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 2043MK5-VRVarian 0332 F 9453 302 Diffusion
Specifications
Oven length680 cm[1]—
Process gas optionsAir, Nitrogen, Formic Acid, forming gas[1]—
Heated zonesConvection: 10 Top / 10 Bottom; IR: 3 Top[1]—
Heated length (convection/total)327 cm / 430 cm[1]—
Cool zones3 Top (Bottom Option)[1]—
Max working temperature (convection / IR)Standard: 350°C / 400°C; Option: 400°C / 480°C[1]—
Min vacuumStandard: 10 Torr; Option: <10 Torr[1]—
Max board size500 mm (L) x 450 mm (W) x 29 mm (H)[1]—
Cleanroom optionDown to Class 1000[1]—
Heated zones (convection)10 top / 10 bottom[1]—
Heated zones (IR)3 top[1]—
Heated length (convection)327 cm[1]—
Heated length (total)430 cm[1]—
Cooling rate>3°C/sec[1]—
Max working temperature (convection / IR) standard350°C / 400°C[1]—
Max working temperature (convection / IR) option400°C / 480°C[1]—
Min vacuum standard10 Torr[1]—
Min vacuum option<10 Torr[1]—
Equipment typeVacuum reflow oven[1]—
Production focusHigh volume production[1]—
Heated convection zones10 top / 10 bottom[2]—
IR zones3 top[2]—
Heated length327 cm convection / 430 cm total[2]—
Max working temperatureStandard: 350°C / 400°C; Option: 400°C / 480°C[2]—
Minimum vacuumStandard: 10 Torr; Option: <10 Torr[2]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]
Make—Varian[3]
Model—0332 F 9453 302[3]
Category—Thermal / Diffusion[5]
Tool type—diffusion pump[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]hellerindustries.comhellerindustries.com
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com
  5. [5]waferpedia.comwaferpedia.com