Comparison ledger
Hitachi 1305 BSG 3, Laurell WS-650MZ-23NPPB, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | WS-650MZ-23NPPBLaurell |
|---|---|---|
| OEM | Hitachi | Laurell |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Laurell WS-650MZ-23NPPB |
| Specifications | ||
| Facility equipment category | — | Wet Processing[1] |
| OEM | — | Laurell[2] |
| Model | — | WS-650Mz-23NPPB[2] |
| Equipment type | — | Spin coater[2] |
| Maximum rotational speed | — | 12,000 rpm[2] |
| Speed accuracy | — | ≤1 rpm[2] |
| Maximum acceleration | — | 80,000 rpm/s no-load; 30,000 rpm/s loaded[2] |
| Substrate diameter | — | 10–150 mm round; up to 125 × 125 mm square[2] |
| Chamber diameter | — | 9.5 in (241 mm)[2] |
| Chamber material | — | NPP (natural polypropylene)[2] |
| Vacuum pump | — | Oil-free, 220–240 V AC, 50/60 Hz, 4.5 SCFM (0.11 m³/min), adjustable vacuum range 25–28 inHg (635–711 mmHg)[2] |
| Programmable steps | — | ≥20 programs, each with ≥51 speed/time steps[2] |
| Timer resolution | — | 0.1 s (1–5999.9 s/step)[2] |
| PLC controller accuracy | — | <0.006% setpoint[2] |
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