Comparison ledger
Hitachi 1305 BSG 3, Santa Clara Plastics SCP 9400 Batch Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SCP 9400 Batch Wafer ProcessingSanta Clara Plastics |
|---|---|---|
| OEM | Hitachi | Santa Clara Plastics |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Santa Clara Plastics SCP |
| Specifications | ||
| Configuration | — | RCA Clean[1] |
| Manufacturer | — | Santa Clara Plastics[1] |
| Model | — | SCP 9400[1] |
| Equipment name | — | SCP 9400 Batch Wafer Processing[1] |
| Category | — | Wet Processing / Clean[2] |
| Wafer size | — | 8 inch[1] |
| Tool type | — | batch wafer processing system[2] |
| Process description | — | 8-inch RCA clean tool[2] |
| Current equipment status | — | Available[3] |
| Current configuration | — | 200mm[3] |
| Date of manufacture | — | 1998-03-16[3] |
| Description | — | Wet hood[3] |
| Software | — | Sys 4000 Ver 9.8.1 Patch A[3] |
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