Waferpedia

Santa Clara Plastics

SCP 9400 Batch Wafer Processing

Email

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Santa Clara PlasticsSCP 9400 Batch Wafer Processing
No photo available yet

What it is

The Santa Clara Plastics SCP 9400 Batch Wafer Processing is a wet processing and clean system for wafers.[1][2][3]

How it works

The SCP 9400 includes an RCA clean configuration.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

Batch wet processing equipment sits in the wafer-cleaning portion of semiconductor manufacturing.

Applications

The SCP 9400 is used for wafer cleaning in semiconductor manufacturing.[2][3]

What do the numbers mean?

Wafer handling3

Equipment name
SCP 9400 Batch Wafer Processing[1]
Accurate?
Wafer size
8 inch[1]
Accurate?
Tool type
batch wafer processing system[2]
Accurate?

Control & software1

Software
Sys 4000 Ver 9.8.1 Patch A[3]
Accurate?

Configuration & options9

RCA Clean[1]
Accurate?
Manufacturer
Santa Clara Plastics[1]
Accurate?
Model
SCP 9400[1]
Accurate?
Category
Wet Processing / Clean[2]
Accurate?
Process description
8-inch RCA clean tool[2]
Accurate?
Current equipment status
Available[3]
Accurate?
Current configuration
200mm[3]
Accurate?
Date of manufacture
1998-03-16[3]
Accurate?
Description
Wet hood[3]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the Santa Clara Plastics SCP 9400?

It is a batch wafer processing machine in the Santa Clara Plastics SCP 9400 model line.[1]

Not publicly documented

The following facts about the SCP 9400 Batch Wafer Processing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SCP 9400 Batch Wafer Processing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SCP 9400 Batch Wafer Processing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SCP 9400 Batch Wafer Processing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SCP 9400 Batch Wafer Processing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SCP 9400 Batch Wafer Processing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]macquarie.com — macquarie.commacquarie.com
Was this page accurate?

Last updated Oct 12, 2026.

Compare with similar tools

View all →