Comparison ledger
Hitachi CG 4100, Lam Research TCP9400DFM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CG 4100Hitachi | TCP9400DFMLam Research |
|---|---|---|
| OEM | Hitachi | Lam Research |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi CG 4100 | Lam Research TCP9400DFM |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Date of Manufacture | 2013-01-01[1] | — |
| Currently Configured for | 300mm[1] | — |
| Missing or Damaged parts | Fab confirmed there were no missing or damaged parts.[1] | — |
| Vendor | HITACHI[1] | — |
| VID | VID761[1] | — |
| SW Version | 35.47[1] | — |
| Resolution | 1.8nm[1] | — |
| throughput | 42wafer/h[1] | — |
| MAM Time | 2.8sec[1] | — |
| Stage Landing Accuracy | ±1μm[1] | — |
| Dry | — | Poly Etcher[2] |
| Manufacturer | — | Lam Research (listed as LAM / Lam)[3] |
| Model / Part No. | — | TCP9400DFM[2] |
| Equipment type | — | Dry poly etcher[2] |
| Process | — | Poly etch[3] |