Comparison ledger
Hitachi RS 5500, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RS 5500Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi RS 5500 | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | 1 Load port fully functional[1] | NIST Traceable[4] |
| Vintage | 2007 | — |
| Manufacturer | Hitachi[2] | — |
| Model | RS 5500[2] | — |
| Tool type | Scanning electron microscope (SEM)[2] | — |
| Category | Metrology & Inspection[3] | — |
| Load port status | 1 load port fully functional; 1 load port not functional (possible sensor issue)[1] | — |
| Wafer Size | — | 8 inch[5] |
| Traceability | — | NIST[6] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[5] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →