Comparison ledger
Hitachi S 8840 CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 8840 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 8840 CD-SEM | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Single Phase[1] | NIST Traceable[3] |
| Voltage | 100V[1] | — |
| OEM | Hitachi[2] | — |
| Model | S 8840[2] | — |
| Wafer Size | 8 inch[1] | 8 inch[4] |
| Phase | Single Phase[1] | — |
| Current | 50 A[1] | — |
| Vintage | 1999[1] | — |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[4] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →