Comparison ledger
JEOL JEM-ARM300F, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | JEM-ARM300FJEOL | |
|---|---|---|
| OEM | JEOL | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2014 first demonstrated · 2014 First demonstration of 45 pm STEM resolution · 2014 First demonstration | — |
| Control system | — | — |
| Generation | — | — |
| Family | JEOL JEM-ARM300F | KLA .496 PSL Wafer |
| Specifications | ||
| instrument type | atomic transmission electron microscope[1] | — |
| microscope voltage | 300 kV[1] | — |
| STEM resolution | 45 pm[1] | — |
| Accelerating voltage | 300 kV[1] | — |
| Type | Transmission electron microscope (TEM/STEM)[1] | — |
| Demonstrated resolution (STEM) | 45 pm[1] | — |
| Instrument type | Atomic resolution transmission electron microscope[2] | — |
| Maximum accelerating voltage | 300 kV[2] | — |
| Resolution at 300 kV in STEM mode | 0.063 nm[1] | — |
| TEM lattice resolution | 0.05 nm[2] | — |
| Accelerating voltages in standard configuration | 300 kV and 80 kV[2] | — |
| Column diameter | 330 mm[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
| Category | — | Metrology & Inspection[4] |
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