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JEOL

JEM-ARM300F

Metrology & InspectionJEOL JEM-ARM300F family
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The JEOL JEM-ARM300F is a 300 kV atomic transmission electron microscope. The JEM-ARM300F was used to demonstrate a STEM resolution of 45 pm in 2014.[1]

JEOLJEM-ARM300F
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Power

300 kV[1]

Optics

45 pm[1]

What it is

The JEM-ARM300F is an atomic resolution electron microscope in JEOL’s transmission electron microscope product line. The JEM-ARM300F is discontinued. The JEM-ARM300F offers a maximum accelerating voltage of 300 kV. The JEM-ARM300F is equipped with JEOL’s own Cs correctors. The JEM-ARM300F guarantees STEM-HAADF image resolution of 58 pm. The JEM-ARM300F can be configured with a STEM spherical aberration corrector, a TEM aberration corrector, both correctors, or without correctors.[2]

Where it fits in the process flow

The JEM-ARM300F is primarily intended for public and private research institutes and semiconductor manufacturers. JEOL presents an application for the JEM-ARM300F titled Structural Analysis of Semiconductor Devices by Using STEM/EDS Tomography.[3][2]

Applications

General reference — not yet source-verified

Transmission electron microscopes are used to examine crystal structure, interfaces, defects, contamination, phase contrast, diffraction behavior, and local chemistry in thin specimens. In semiconductor and materials work, aberration-corrected instruments of this class support analysis of device cross sections, thin films, interconnect structures, epitaxial layers, nanoparticles, ceramics, metals, and other advanced materials. Analytical attachments in this class are commonly used to combine imaging with elemental or energy-loss analysis.

  • electron microscopy
  • scanning transmission electron microscopy

What do the numbers mean?

Power & electrical4

microscope voltage
300 kV[1]
Accurate?
Accelerating voltage
300 kV[1]
Accurate?
Maximum accelerating voltage
300 kV[2]
Accurate?
Accelerating voltages in standard configuration
300 kV and 80 kV[2]
Accurate?

Optics & imaging7

STEM resolution
45 pm[1]
Accurate?
Demonstrated resolution (STEM)
45 pm[1]
Accurate?
Instrument type
Atomic resolution transmission electron microscope[2]
Accurate?
STEM resolution
58 pm[2]
Accurate?
Resolution at 300 kV in STEM mode
0.063 nm[1]
Accurate?
TEM lattice resolution
0.05 nm[2]
Accurate?
Column diameter
330 mm[2]
Accurate?

Configuration & options2

instrument type
atomic transmission electron microscope[1]
Accurate?
Type
Transmission electron microscope (TEM/STEM)[1]
Accurate?

Vintage & configurations

  1. 2014first demonstrated[1]

    A STEM resolution of 45 pm with a 300 kV microscope was first demonstrated with the JEM-ARM300F.

  2. 2014First demonstration of 45 pm STEM resolution[1]

    A STEM resolution of 45 pm with a 300 kV microscope was first demonstrated with the JEM-ARM300F.

  3. 2014First demonstration[1]

    A 45 pm STEM resolution was first demonstrated with the JEM-ARM300F in 2014.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • microscope voltage300 kV[1]
  • Accelerating voltage300 kV[1]
  • Maximum accelerating voltage300 kV[2]
  • Accelerating voltages in standard configuration300 kV and 80 kV[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the JEOL JEM-ARM300F?

The JEM-ARM300F is an atomic resolution electron microscope in JEOL’s transmission electron microscope product line.[2]

What is the maximum accelerating voltage of the JEM-ARM300F?

The JEM-ARM300F offers a maximum accelerating voltage of 300 kV.[2]

What detectors and analytical options are available for the JEM-ARM300F?

The JEM-ARM300F supports optional EDS, EELS, a backscattered electron detector, and 4 types of STEM observation detector.[2]

Is the JEM-ARM300F still a current product?

The JEM-ARM300F is discontinued.[2]

Not publicly documented

The following facts about the JEM-ARM300F are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the JEM-ARM300F are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the JEM-ARM300F are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the JEM-ARM300F are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the JEM-ARM300F is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the JEM-ARM300F are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
  2. [2]jeol.com — jeol.comjeol.com
  3. [3]JEM-ARM300F2 - JEOL (Germany) GmbH and Nordic (AB) — jeol.dejeol.de
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Last updated Oct 19, 2026.

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