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Comparison ledger

0035235-003 MMD Head versus AIT XUV Darkfield

KLA 0035235-003 MMD Head and KLA AIT XUV Darkfield, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
0035235-003 MMD HeadKLA
AIT XUV DarkfieldKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA AIT XUV
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]Pillar[2]
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Software Version—6.3.24.3[2]
CIM—SECS / GEM[2]
Factory System—FOUPS[2]
Handler System—Robot[2]
Missing Parts—Incomplete Wafer Handler Module & Inspection Module[2]
0035235-003 MMD Head entryAIT XUV Darkfield entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing