Waferpedia

Comparison ledger

0035235-003 MMD Head versus INS 3000 DUV Defect

KLA 0035235-003 MMD Head and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 0035235-003 MMD HeadKLA INS 3000
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]Auto Focus check for each lens[2]
Model0035235-003[1]
MakeKLA[1]
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]
Compatible SystemKLA AIT-XP[1]
Wafer sizeWafer transport check[2]
StageSlight left-to-right tilt observed; minor scratches present[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing