Comparison ledger
KLA 0035235-003 MMD Head, Rigaku Smax 3000 Small Angle X-ray Scattering, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Rigaku |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | Rigaku Smax 3000 Small Angle X-ray Scattering |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | System was recently upgraded with a new Xenocs detector[2] |
| Model | 0035235-003[1] | — |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Type | — | small-angle X-ray scattering (SAXS) system[3] |
| X-ray generation | — | X-rays can be generated[3] |
| Anode | — | rotating copper anode[2] |
| Detector upgrade | — | recently upgraded with a new Xenocs detector[2] |
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