Waferpedia

Comparison ledger

0035235-003 MMD HeadversusScientific FEI Phenom

KLA 0035235-003 MMD Head, Thermo Fisher Scientific FEI Phenom, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadThermo Fisher Scientific FEI Phenom
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]World Desktop[2]
Model0035235-003[1]Phenom[3]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Manufacturer—Thermo Fisher Scientific / FEI[3]
Tool type—Scanning electron microscope[3]
Category—Metrology & Inspection[2]
Wafer size—8 inch[3]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing