Comparison ledger
KLA 0035235-003 MMD Head, Zeiss Supra 40 VP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Supra 40 VPZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | Zeiss Supra 40 VP |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | Coolstage (never used)[2] |
| Model | 0035235-003[1] | Supra 40 VP[2] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Lowest Coolstage Temp | — | -50 C Deg[2] |
| Type | — | Scanning electron microscope (SEM)[2] |
| Category | — | Metrology & Inspection[3] |
| Accessory / subsystem mentioned | — | Thermofisher EDS[3] |
| Configuration / option mentioned | — | Coolstage (never used)[3] |
| Lowest Coolstage temperature | — | -50 C Deg[3] |
| Issue noted | — | Issue with the transmitted detector[3] |
| Device class | — | Electron microscope[4] |
| Manufacturer | — | ZEISS[4] |
| Application | — | High resolution microscopy; structure and element analysis of ready-prepared surfaces and cross-sections; characterisation of crystal structure[4] |
| Source / emitter | — | Gemini® tube with Schottky emitter[4] |
| Variable pressure option | — | Available for investigating non-conducting specimen without previous metallisation[4] |
| Maximum resolution | — | 1.3 nm @ 15 kV; 2.1 nm @ 1 kV; 5.0 nm @ 0.2 kV[4] |
| Magnification | — | 12…900,000x[4] |
| Acceleration voltage | — | 0.1…30 kV[4] |
| Measurement current | — | 4 pA…20 nA[4] |
| Detectors | — | In-Lens detector; Everhart-Thornley-SE detector; VPSE detector[4] |
| Software | — | SmartSEM[5] |
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