Comparison ledger
KLA 1.112 PSL Wafer, KLA Candela 6120 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Candela |
| Specifications | ||
| Configuration | NIST Traceable[1] | HDD and Software Included[4] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Phase | — | Equipment Configuration: - 1 phase (620W) - 50/60Hz - Parallel connection and power connection - Test sample: 50 thickness, 95mm diameter DISK (both sides)[3] |
| Test Sample | — | 50 Thickness, 95 mm Diameter DISK (Both Sides)[4] |
| Wafer sizes | — | 8 inch[3] |
| Power | — | 1 phase 620W, 50/60Hz[3] |
| HDD and Software Included | — | Yes[4] |
| Vintage | — | 2008[4] |
| Make | — | KLA[3] |
| Model | — | Candela 6120[3] |
| Equipment type | — | Surface Inspection System[3] |
| Wafer size | — | 8 inch[3] |
| Frequency | — | 50/60Hz[3] |
| Connection | — | Parallel connection and power connection[3] |
| Included items | — | HDD and software included[4] |
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