Comparison ledger
KLA 1.112 PSL Wafer, Olympus MX80, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MX80Olympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Olympus MX80 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Objectives | — | 1.25x, 5x, 10x, 20x, 50x, and 100x[3] |
| Eyepiece | — | 10x binocular eyepiece[3] |
| Camera | — | Optronics MagnaFire camera with capture software[3] |
| Image analysis software | — | ImagePro Plus[3] |
| Dark field imaging | — | Available for 5x through 100x objectives[3] |
| Nomarski imaging | — | Included for 5x through 100x objectives[3] |
| Illumination | — | Top and bottom illumination[3] |
| UV filter | — | For imaging photoresist[3] |
| Output | — | Photo printer[3] |
| Dark field | — | Available for 5x through 100x objectives[3] |
| Viewing head | — | Ergonomic tilting trinocular erect image head[4] |
| Nosepiece | — | Motorized nosepiece[4] |
| Stage | — | Large stage with clutch[4] |
| Head | — | Ergonomic tilting head with super widefield eyepieces[5] |
| Imaging modes | — | Brightfield, darkfield, and Nomarski illumination[5] |
| Eyepieces | — | 10x binocular eyepiece[3] |
| Photo printer | — | Included[3] |
| Power | — | 12v 100w halogen[6] |
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