Olympus
MX80
The Olympus MX80 is an inspection microscope. The Olympus MX80 includes 1.25x, 5x, 10x, 20x, 50x, and 100x objectives. The Olympus MX80 supports brightfield, darkfield, and Nomarski imaging.[1][2][3]
Power
12v 100w halogen[4]
Gas delivery
For imaging photoresist[1]
Optics
1.25x, 5x, 10x, 20x, 50x, and 100x[1]
What it is
General reference — not yet source-verifiedInspection microscopes are bench instruments used to examine patterned wafers, films, and other small features at high magnification. The class is used to check feature quality, surface condition, and process results after fabrication steps.
How it works
General reference — not yet source-verifiedAn inspection microscope forms an enlarged optical image of a sample through a selectable objective and eyepiece path. The instrument class commonly uses reflected light, contrast methods, and camera capture to reveal topography, edges, contamination, and pattern fidelity on opaque or reflective specimens.
Where it fits in the process flow
General reference — not yet source-verifiedThe Olympus MX80 sits in the inspection and metrology portion of the process flow. The instrument is used after fabrication steps that create visible features requiring optical review, measurement, or defect inspection.
What can it run?
Process applications and technology nodes documented for this tool.
- Inspection
- Imaging photoresist
What do the numbers mean?
Power & electrical2
Gas & chemistry1
Optics & imaging9
Control & software1
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MX80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MX80 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MX80 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MX80 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MX80 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MX80 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]spectraservices.com — spectraservices.comspectraservices.com
- [4]microscopecentral.com — microscopecentral.commicroscopecentral.com
- [5]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu
Last updated Oct 9, 2026.
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