Comparison ledger
KLA 1.112 PSL Wafer, SCREEN ZI 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ZI 2000SCREEN | |
|---|---|---|
| OEM | KLA | SCREEN |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | SCREEN ZI 2000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Phase | — | 1 Phase[3] |
| Make | — | SCREEN / DNS[3] |
| Model | — | ZI 2000[3] |
| Power | — | 1 phase, 50/60 Hz[3] |
| Included PCs | — | Conveyance PC, External PC, Control PC[3] |
| Included components | — | Monitor, Parts[3] |
| Wafer size | — | φ76 mm to φ200 mm[4] |
| Transfer | — | Robot transfer system[4] |
| Inspection method | — | Comparative (Die to Die, Cell to Cell)[4] |
| Light source | — | RGB 3-color LED lighting (choice of 3 colors)[4] |
| Optical resolution | — | 1.5 μm × 1.5 μm; 4 μm × 4 μm[4] |
| Dimensions (W×D×H) | — | 1,400 mm × 1,250 mm × 2,030 mm[4] |
| Vintage | — | 2013[3] |
| Dimensions (WxDxH) | — | 1,400 mm 1,250 mm 2,030 mm[4] |
| Power / phase / frequency | — | 1 Phase - 50/60 Hz[3] |
| Included items | — | Conveyance PC, External PC, Control PC, Monitor, Parts[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →