SCREEN

ZI 2000

Metrology & Inspection SCREEN ZI 2000 family

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The SCREEN ZI 2000 is a wafer pattern inspection system. The SCREEN ZI 2000 supports wafer sizes from φ76 mm to φ200 mm. The SCREEN ZI 2000 uses comparative inspection methods including Die to Die and Cell to Cell.^[1]

ZI 2000 — Inventory photo — Fig. 01ZI 2000Inventory photo^[2]

Power

50/60 Hz^[2]

Optics

1.5 μm × 1.5 μm; 4 μm × 4 μm^[1]

What it is

The SCREEN ZI 2000 is a visual inspection system for patterned wafers.^[2]^[1]^[3]

How it works

The ZI 2000 uses a proprietary lens and lighting system together with a high-speed image processing engine.^[1]^[3]

The ZI 2000 supports real-time confirmation of inspection results and includes real-time ADC, or Auto Defect Classification.^[1]^[3]

Where it fits in the process flow

The ZI 2000 is used in front-end wafer processing for in-process inspection and in final visual inspection.^[1]^[3]

Applications

The ZI 2000 inspects patterned wafers across a wide range of front-end process uses and final visual inspection use cases.^[1]^[3]

What do the numbers mean?

Power & electrical3

50/60 Hz^[2]
Power: 1 phase, 50/60 Hz^[2]
Power / phase / frequency: 1 Phase - 50/60 Hz^[2]

Wafer handling3

Wafer size: φ76 mm to φ200 mm^[1]
Transfer: Robot transfer system^[1]
Wafer size: to inch (6 to 00 mm)^[1]

Optics & imaging1

Optical resolution: 1.5 μm × 1.5 μm; 4 μm × 4 μm^[1]

Control & software5

Conveyance PC^[2]; External PC^[2]; Control PC^[2]
Included PCs: Conveyance PC, External PC, Control PC^[2]
Included items: Conveyance PC, External PC, Control PC, Monitor, Parts^[2]

Dimensions & facilities2

Dimensions (W×D×H): 1,400 mm × 1,250 mm × 2,030 mm^[1]
Dimensions (WxDxH): 1,400 mm 1,250 mm 2,030 mm^[1]

Configuration & options10

Phase: 1 Phase^[2]; With:^[2]; Monitor^[2]; Parts^[2]
Make: SCREEN / DNS^[2]
Model: ZI 2000^[2]
Included components: Monitor, Parts^[2]
Inspection method: Comparative (Die to Die, Cell to Cell)^[1]
Light source: RGB 3-color LED lighting (choice of 3 colors)^[1]
Vintage: 2013^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration50/60 Hz^[2]
Power1 phase, 50/60 Hz^[2]
Power / phase / frequency1 Phase - 50/60 Hz^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What inspection method does the ZI 2000 use?

The ZI 2000 uses comparative inspection, including Die to Die and Cell to Cell methods.^[1]^[3]

What wafer sizes can the ZI 2000 inspect?

The ZI 2000 inspects wafers from 76 mm to 200 mm in diameter.^[1]^[3]

What transfer system does the ZI 2000 use?

The ZI 2000 uses a robot transfer system.^[1]^[3]

What light source does the ZI 2000 use?

The ZI 2000 uses RGB three-color LED lighting with a choice of three colors.^[1]^[3]

Does the ZI 2000 provide real-time inspection result review?

The ZI 2000 allows inspection results to be confirmed in real time and includes a real-time ADC function for automatic defect classification.^[1]^[3]

Not publicly documented

The following facts about the ZI 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ZI 2000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ZI 2000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ZI 2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ZI 2000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ZI 2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report