Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI Tecnai G 2 F 20 X-Twin TEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Tecnai G 2 F 20 X-Twin TEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI Tecnai G 2 F 20 X-Twin TEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Fischione M3000 HAADF[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Camera | — | Orius SC 1000, model 832[4] |
| Software version | — | 4.2[4] |
| Spot drift | — | 0.424 nm/min[4] |
| FEG probe current | — | 0.923 nA[4] |
| Specimen drift | — | < 0.5 nm/min[3] |
| Resolution TEM point | — | < 0.26 nm[3] |
| Resolution TEM line | — | 0.102 nm[4] |
| Information limit | — | < 0.14 nm[3] |
| Power / electrical | — | Compressor 115 V, 50/60 Hz[4] |
| Optics | — | On-axis BF/DF detector[4] |
| Configuration / options | — | Fischione M3000 HAADF; Oxford X-Max 250 SDD; 19" Accessory cabinet 33U; External scan switch facility; EFTEM EELS module; 20" LCD monitor; 1600 XP UPS; R075 Chiller[4] |
| Core instrument | — | Transmission electron microscope[4] |
| Resolution HRSTEM | — | 0.192 nm[3] |
| Resolution EDX | — | 126[3] |
| GIF | — | 0.8 eV[3] |
| Application | — | Metrology & Inspection[4] |
| Detector | — | On-axis BF/DF detector[4] |
| Module | — | EFTEM EELS module[3] |
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