Comparison ledger
KLA 200 and KLA AIT XUV Darkfield, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 200KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 200 | KLA AIT XUV |
| Specifications | ||
| Supported equipment family | KLA 200 series pattern inspection stations[1] | — |
| Related supported equipment | KLA Tencor 300 Series Pattern Inspection Stations, STARlight tools, and URSA tools[1] | — |
| Data hub function | 9X Fileservers are central data hubs serving KLA Tencor reticle inspection equipment[1] | — |
| Software function | 9X System Software supports storage and retrieval of setup and result files and several analysis functions[1] | — |
| Software Version | — | 6.3.24.3[2] |
| CIM | — | SECS / GEM[2] |
| Factory System | — | FOUPS[2] |
| Handler System | — | Robot[2] |
| Configuration | — | Pillar[2] |
| Missing Parts | — | Incomplete Wafer Handler Module & Inspection Module[2] |
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