KLA
The KLA 200 family shares data infrastructure with other reticle inspection equipment, and the same 9X platform also supports third-party repair stations. The analysis environment is intended to store setup and result files for inspection and follow-on review.[1]
Process applications and technology nodes documented for this tool.
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
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The following facts about the 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Aug 14, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.