Comparison ledger
KLA .204 PSL Wafer, KLA 2213-75 TSLKTB Argon, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 2213-75 TSLKTB Argon |
| Specifications | ||
| Configuration | NIST Traceable[1] | Compatible for KLA AIT II & XP Series Systems[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Product type | — | Argon laser[4] |
| Part number | — | 2213-75TSLKTB[4] |
| Compatibility | — | KLA AIT II & XP Series Systems; AIT II, AIT XP, and AIT XP+ systems[4] |
| Condition / warranty | — | Refurbished; 1-year warranty or 5,000 hours[4] |
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