Comparison ledger
KLA .204 PSL Wafer, KLA 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6420KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2023 decommissioned |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 6420 |
| Specifications | ||
| Configuration | NIST Traceable[1] | new laser[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Manufacturer | — | KLA[5] |
| Model | — | 6420[4] |
| Tool type | — | Inspection System[4] |
| Category | — | Metrology & Inspection[5] |
| Wafer sizes | — | 8 inch[4] |
| Vintage | — | 1997 Vintage[4] |
| Status note | — | software boots; measurement and board functionality noted; laser inoperative[4] |
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