Comparison ledger
KLA .204 PSL Wafer, KLA 8 XXX CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8 XXX CD-SEMKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 8 XXX CD-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Replacement for KLA part number 720-12647-000[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Type | — | Critical Dimension Scanning Electron Microscope (CD-SEM) replacement assembly[4] |
| Replacement for KLA part number | — | 720-12647-000[4] |
| Compatible with | — | 8100, 8100XP, 8200, 8250[4] |
| Not for systems with MCP detector | — | Yes[4] |
| Improvements over previous version | — | Less potential to arc from energy filter to scintillator; less potential to arc from energy filter to ground mesh; stronger and more stable mesh structure; longer life[4] |
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