Waferpedia

Comparison ledger

.204 PSL Wafer versus AIT II Defect

KLA .204 PSL Wafer and KLA AIT II Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
AIT II DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA AIT
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
TraceabilityNIST[1]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
Software Version—5.3.20.4[2]
CIM—SECS, GEM[2]
Handler System—Dual[2]
Factory Interface—Open Cassette[2]
.204 PSL Wafer entryAIT II Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing